摘要 |
PROBLEM TO BE SOLVED: To provide an ultra-accurate displacement measuring instrument, having high sensitivity where the instrument can make ultra-accurate measurements with positional resolution of micrometers or smaller. SOLUTION: This displacement measuring instrument incorporates an electromagnetic system 10, which forms a closed loop by using magnetic bodies 17 and 19 and accepts a main coil winding 11 and a secondary coil winding 13, forming a magnetic field in the closed loop formed of the bodies 17 and 19, a plate spring 20 which is equipped with a displacement-inputting section 21 and an outputting section 24 fixed to a core 14 wound a secondary coil and guides the outputting section 24 to output proportionally amplified displacement with respect to the displacement inputted to the inputting section 21, and a supporting means 30, which supports the displacement inputting section 21 of the spring 20 so that the inputted displacement is inputted in one direction only.
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