发明名称 HIGH-SENSITIVITY DISPLACEMENT MEASURING INSTRUMENT
摘要 PROBLEM TO BE SOLVED: To provide an ultra-accurate displacement measuring instrument, having high sensitivity where the instrument can make ultra-accurate measurements with positional resolution of micrometers or smaller. SOLUTION: This displacement measuring instrument incorporates an electromagnetic system 10, which forms a closed loop by using magnetic bodies 17 and 19 and accepts a main coil winding 11 and a secondary coil winding 13, forming a magnetic field in the closed loop formed of the bodies 17 and 19, a plate spring 20 which is equipped with a displacement-inputting section 21 and an outputting section 24 fixed to a core 14 wound a secondary coil and guides the outputting section 24 to output proportionally amplified displacement with respect to the displacement inputted to the inputting section 21, and a supporting means 30, which supports the displacement inputting section 21 of the spring 20 so that the inputted displacement is inputted in one direction only.
申请公布号 JP2001221606(A) 申请公布日期 2001.08.17
申请号 JP20010006083 申请日期 2001.01.15
申请人 KOREA ADVANCED INST OF SCI TECHNOL 发明人 KIN SHUGEN;SAI TOSHUN
分类号 G01B7/24;G01B7/00;G01B7/02;G01D5/22;(IPC1-7):G01B7/00 主分类号 G01B7/24
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