| 摘要 |
PROBLEM TO BE SOLVED: To measure various uneven profiles including stamps formed on the surfaces objects, without being influenced by the apparent states of the surfaces by directly measuring the profiles by applying the laser ranging technique. SOLUTION: A laser ranging unit 3, provided with a laser beam emitting section 3a and a laser beam receiving section 3b, is set up with the unit 3 being rotatable about a spindle. The unit 3 is moved at fixed pitch in the axial direction of the spindle, wherever the unit 3 is in the one-way rotated once. The emitting section 3a emits a laser beam upon stamps formed on the surface of a plate and the receiving section 3b receives a reflected laser beam from the surface of the plate. A first computing means computes the distance to the projecting point of the laser beam based on a signal from the unit 3. The profile about the depths of the stamps is measured, through scanning of the whole area of the stamps with the laser beam, by causing the unit 3 to make rotations and fixedpitch movement.
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