| 摘要 |
PROBLEM TO BE SOLVED: To provide a mechanism and a method of forming a bump, by which thrust in the case of the movement of a capillary can be increased without deteriorating the loading resolution of the bump forming mechanism, and a bump forming device. SOLUTION: In the driving of a capillary 107, a plurality of independently controllable driving sources 21 are provided in a control circuit 220, and movement at high speed and low loading control are realized by changing the thrust generating direction by the movement operation and loading operation of the capillary to a plurality of these driving sources. Thus, the bump forming mechanism can satisfy the contradictory requirements of the increase in the speed of bonding cycle and low loading control. |
