DEVICE FOR MEASURING DISTRIBUTION OF ELECTRON BEAM

摘要

PROBLEM TO BE SOLVED: To more precisely and over a longer time measure spatial distribution of the amount of an irradiated electron beam in a wide current range, even through the amount of the irradiation onto an object locally varies when the intensity of an electron beam fluctuates spatially in a domain of an electron beam irradiator irradiated with the electron beam. SOLUTION: Many current measurement probes are placed right under an electron beam irradiation window and are grounded by way of resistance to measure a current flowing via each of the current measurement probes. The measured current shows the spatial distribution of an electron beam current in the irradiated region.