| 摘要 |
PURPOSE: A method for manufacturing a heating device and a method for manufacturing a heat spraying type ink jet print head are provided to obtain superior mechanical properties by utilizing a single crystal silicon island such as a single silicon pattern or an isolated substrate surface part as a heating resistance, thereby extending the lifespan of the heating resistance and reducing the number of protection layers surrounding the heating resistance. CONSTITUTION: A method for manufacturing a heat spraying type ink jet print head includes the steps of forming an impurity area(120a) on a surface of a heating part of a single crystal silicon substrate(110) with an impurity doping concentration higher than the substrate by the ion-injection method, forming a single crystal silicon film pattern on the impurity area with an impurity doping concentration lower than the impurity area, forming a porous silicon area in the impurity area only, forming a thermal oxidation film by oxidizing the whole surface and the porous silicon area, forming a thermal oxidation film pattern by patterning the thermal oxidation film to expose a predetermined area of the single crystal silicon film pattern and the substrate surface of a main ink supply part, forming heating electrodes(160a) and electro-plating electrodes(162a), forming an insulation pattern(165a) covering the heating electrodes, forming a plating seed layer(170) on the whole surface, forming a photosensitive film pattern(175a) having an opening part for exposing the plating seed layer, forming a plating layer pattern(180a) for exposing a predetermined area of the photosensitive film pattern, removing the substrate located in the main ink supply part and the electro-plating electrodes, and removing the plating seed layer and the photosensitive film pattern.
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