| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a carrier for heat treatment with which a lot of substrates are heat-treated simultaneously at constant temperature. SOLUTION: This carrier for heat treatment used when a substrate 24 is heattreated is provided with a main body 2 of a rectangular parallelepiped shape in which each of side surfaces is opened, shelf-supporting members 9 that are provided on inner surfaces on both sides in the width wise direction of the main body with specified intervals along the vertical direction, and shelf members 12 that are formed into a frame shape provided with supporting members 16 supporting the plate surface of the to-be-treated material partially, and can be drawn out from the front of the main body by slidably engaging both ends in the width wise direction with a pair of shelf-supporting members 9 at the corresponding height of the inner surfaces on both sides of the main body.</p> |
