| 摘要 |
<p>PROBLEM TO BE SOLVED: To realize accurate quantitative analysis by keeping at a constant value background components caused by scattered electrons and secondary electrons increased by energy increase of an irradiated X-ray 11, to thereby facilitate removal thereof, and by taking out only a signal component precisely, when energy of the irradiated X-ray 11 is increased and the intensity change of electrons 19 generated from a sample is observed in measurement of electron yield X-ray absorption spectrum. SOLUTION: In this X-ray absorption spectrum measurement, a voltage difference VS-VD between the surface of the sample 15 and a detector 16 is synchronized with the energy increase (stepΔEex(eV)) of the irradiated X-ray 11, and increased (stepΔ(VS-VD)), and a step width thereof is equalized (ΔEex=Δ(VS- VD)). Thereby the minimum value of energy of detected electrons 19 is increased equally to the increase quantity of the irradiated X-ray energy, and detection intensity of the scattered electrons and the secondary electrons which become the background components is kept at a constant value, and offset is added to a circuit or numerical calculation, to remove the background.</p> |
