| 摘要 |
PROBLEM TO BE SOLVED: To provide an Al-family electrode film and an LCD that is formed by a new Al-family target material by preventing micro organization segregation and further the generation of a small gap causing splashes. SOLUTION: The Al-family electrode film has an organization where the compound of either one type or two types out of elements that are selected fro transition elements and Al is dispersed in an Al matrix, and contains a 3A-family element as the transition element as a requisite while an Al region that does not contain any compound whose long diameter is equal to or more than 0.5μm in the organization is formed by a target material for Al-family sputtering whose inscription circle diameter does not exceed 10μm. Then, the Al-family electrode film is applied to the LCD.
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