| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor test device which can test read-out of a ROM device having higher operation speed than conventional one. SOLUTION: In a semiconductor test device provided with AFM storing fail information which performs a read-out test of a ROM device being a device to be tested, a device output signal read out from the prescribed address of DUT is made fail information prescriptively, and the fail information is stored in an address position corresponding to AFM. After performing the read-out test, the fail information stored in each address of the AFM are read out, and a normal or defective condition of each memory cell is discriminated by comparing the verification data used for discrimination of a normal/defective condition corresponding to an address with the fail information.
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