发明名称 WAFER AND WAFER TEST SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a wafer and a wafer test system which accomplish testing, without impairing the integration level of LSIs and the number of pins at a lower cost in a wafer on which dies are formed. SOLUTION: In a wafer test system of a wafer 1 on which a plurality of dies 4 are formed, a wafer 1 has a test pattern supply circuit 3 for supplying a test pattern to each of the plurality of dies 4 and a comparator circuit 5, which inputs a plurality of results of testing outputted separately from the plurality of dies 4 in response to the respective test patterns supplied from the test pattern supply circuit 3 to compare the plurality of results inputted and judges the propriety of the results compared to output the judged results. The testing of the wafer is implemented using the wafer 1.
申请公布号 JP2001221833(A) 申请公布日期 2001.08.17
申请号 JP20000032196 申请日期 2000.02.09
申请人 MITSUBISHI ELECTRIC CORP 发明人 NAKAJIMA HIROTOMO;HATTORI TAKASHI
分类号 G01R31/28;H01L21/66;(IPC1-7):G01R31/28 主分类号 G01R31/28
代理机构 代理人
主权项
地址
您可能感兴趣的专利