| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramics heater to improve the uniformity of heat distribution at a heater surface by the optimization of aspect ratio (thickness/width) of a heating layer made of heating decomposed graphite. SOLUTION: The ceramics heater joined to the heating layer made of heat decomposed graphite of the surface of a supporting base material at least made of ceramics, is characterized by the aspect ratio (thickness/width) of the heating layer ringing within 0.002-0.01.
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