DIELECTRIC THIN FILM, ITS MANUFACTURING METHOD, AND ITS ELECTRONIC PRODUCT

摘要

PROBLEM TO BE SOLVED: To allow an effective use of grating distortion due to misfit grating and reduce leak current, and improve fatigue characteristics. SOLUTION: Substantially one layer of X3}O corresponding to one atom layer of X3}O is inserted into a substrate 10 similar to a thin film in crystalline construction at an appropriate interval while perovskite oxide X1} X2}O3 layer 12 is caused to grow epitaxially. X1} and X3} are Ca or the like, X2}, Ti or the like, and 'O', oxygen. An X3}O layer 14 introduced so that the perovskite structure of the X1} X2}O3 layer 12 is divided, but in a state of extremely high structural fitness with the perovskite structure to form a laminar perovskite structure. The X3}O layer 14 acts as a blocking layer against misfit (grating misfit) dislocation introduction, thus resulting in ferroelectric thin film holding a high grating distortion.