| 摘要 |
PROBLEM TO BE SOLVED: To provide a size inspecting/measuring method and device, capable of determining whether the size and shape of an object to be measured each lie within a prescribed value or whether the quality of the shape, even when it is difficult to measure the shape and size of the object to be measured, and to determine its shape. SOLUTION: The contour of an object to be inspected and measured is detected in a direction which is different from the direction of measurement of the object to be inspected and measured. By registering the detected location, the information of the location registration is constituted. The correlation values of a measurement range, compared with the information of the location registration in the direction of measurement when measurements and inspections are performed, are extracted, and a section having highest correlation with the information of the location registration is taken as the location of one side of the section of size measurement to measure and inspect sizes.
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