METHOD FOR PRODUCING A CONDUCTIVE DOPED DIAMOND-LIKE NANOCOMPOSITE FILM AND CONDUCTIVE DOPED DIAMOND-LIKE NANOCOMPOSITE FILM

摘要

The inventive method for producing a conductive doped diamond-like nanocomposite film which comprises carbon, silicium, metal, oxygen and hydrogen as basic elements, is carried out as follows: a holder with a carrier to which voltage of 0.3-0.5 kV is supplied, is placed in a vacuum chamber; a gas-discharge plasma of the energetic density higher than 5 kWh/gram-atom of carbon particles is generated and organosiloxane is evaporated therein; a beam of doping material particles is introduced into plasma in order to form on the carrier and produce a conductive doped carbonic nanocomposite film. Films having a define interrelation of carbon, metal and silicium atomic concentrations are selected. The film surface is coated with a layer of silicon dioxide. The film is energized with the aid of alternate unipolar current in the mode of a generator, and an electrothermal stimulation is carried out (ETS). Said method enables the conductive doped diamond-like nanocomposite film having the multilayer structure to be produced.