CASSETTE FOR ACCOMMODATING WAFER

摘要

PURPOSE: A cassette(10) for accommodating a wafer is provided to reduce a wafer broken and the generation of scratch caused when a handler carries a wafer by changing an inner structure of the cassette. CONSTITUTION: According to the cassette, an inner wall(1) supporting a wafer(w) becomes open only at an entrance part, and both sides of a part supporting the wafer actually are designed to be parallel each other. Therefore, even when the wafer is entered into the cassette and the wafer is laid across a slope of a slot the movement of the wafer is reduced than before. As a result, when the cassette is put on a cassette mounting of a loader part, the wafer maintains its horizontality, and thus the wafer broken and the generation of scratch are reduced which are caused when the handler carries the wafer.