Mikrobearbeiteter Spiegel mit dahnbarem Rückstellkraftelement

摘要

A mirror assembly (200) of micron dimensions for use in deflecting a beam of light. The mirror assembly includes a planar base (301) and a planar mirror (220) spaced apart from the planar base and disposed generally parallel to the planar base. The planar mirror has first and second end portions (220a, 220b) and a longitudinal axis (303) extending between the first and second end portions. First and second torsional members (306, 307) extend along the longitudinal axis and are connected to the respective first and second end portions for permitting the mirror to rock between first and second positions about the longitudinal axis relative to the planar base. The first and second torsional members are secured to the planar base. At least a portion of the mirror is made from a conductive material. First and second spaced-apart electrodes (322, 323) are carried by the planar base for driving the mirror between the first and second positions. A tether member (431) extends transversely of the longitudinal axis and is secured to the first torsional member and to the planar base. The tether member regulates the rocking of the mirror.