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发明名称
Verfahren zum Bestimmen der Dicke von auf einem Substrat vorgesehenen Schichten
摘要
申请公布号
DE19852323(C2)
申请公布日期
2001.08.16
申请号
DE19981052323
申请日期
1998.11.12
申请人
STEAG HAMATECH AG
发明人
HERTLING, ROLF;SCHAUDIG, WOLFGANG;WINDELN, WILBERT
分类号
G01B11/06;(IPC1-7):G01B11/06;G01B11/22
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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