| 摘要 |
An acceleration sensor includes a substrate (101), a proof mass (110, 210) over the substrate and having first and second attachment regions (113, 114, 213, 214), and an anchor structure (120, 221, 222) coupled to the substrate. The sensor additionally includes a first suspension beam (130, 230) coupling the anchor structure to the first attachment region to suspend the proof mass over the substrate. The sensor further includes a second suspension beam (140, 240) coupling the anchor structure to the second attachment region to suspend the proof mass over the substrate. The first suspension beam has a first radius (311, 321) extending from the anchor structure to the first attachment region, and the second suspension beam has a second radius (312, 322) extending from the anchor structure to the second attachment region where the first radius is greater than the second radius.
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