CERAMIC SUBSTRATE FOR SEMICONDUCTOR PRODUCTION/INSPECTION DEVICE

摘要

A ceramic substrate capable of ensuring a sufficiently large withstand voltage despite a larger-than-ever maximum pore size of up to 50 mu ñm, increasing a fracture toughness by the presence of pores, surviving a thermal shock, and being reduced in camber at high temperatures, comprising a conductor formed on the surface of or inside the ceramic substrate, characterized in that the ceramic substrate consists of non-oxide ceramics containing oxygen and has a maximum pore size of up to 50 mu ñm.