Fluid apparatus such as a pump or an accumulator

摘要

The invention provides a fluid apparatus in which two or more kinds of chemical liquids can be rapidly stirred and mixed in a pump to a uniform concentration. A barrier membrane (7) such as a bellows or a diaphragm that is reciprocally moved in the axial direction is disposed in a pump body (1) so as to form a liquid chamber (9) between the barrier membrane and an inner wall (4a) of the pump body (1). A suction port (18) and a discharge port (19) are disposed in the inner wall (4a) of the pump body (1). Supply pipes (5A) and (5B) respectively for the two or more kinds of chemical liquids are pipe-connected to an inlet portion of the suction port (18) so as to join together. An outlet portion (18a) of the suction port (18) is disposed in a side face of a protruding forward end of a suction check valve (20) which is fixed to protrude from the inner wall (4a) of the pump body (1) into the liquid chamber (9), whereby the outlet portion is opened so as to eject the two or more kinds of chemical liquids toward a circumferential wall (9a) in the liquid chamber (9). Therefore, the two or more kinds of chemical liquids which are separately supplied to the pump body (1) are ejected from the outlet portion (18a) of the suction port (18) so as to circulate along the circumferential wall (9a) of the liquid chamber (9). This circulating action causes the liquids to be stirred and mixed rapidly and uniformly in the liquid chamber (9).