发明名称 |
Method for decomposing nitrogen fluoride or sulfur fluoride and decomposing reagent used therefor |
摘要 |
A method for decomposing nitrogen fluoride or sulfur fluoride, comprising contacting gaseous nitrogen fluoride or sulfur fluoride with a solid reagent comprising elemental carbon, one or more of the alkaline earth metal elements and optionally one or more of the alkali metal elements, to fix the fluorine component in the nitrogen fluoride or sulfur fluoride in said reagent.
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申请公布号 |
US2001013590(A1) |
申请公布日期 |
2001.08.16 |
申请号 |
US20010770402 |
申请日期 |
2001.01.29 |
申请人 |
IZUMIKAWA CHIAKI;TEZUKA KAZUMASA;ITO KAZUTO;ATOBE HITOSHI;KANEKO TORAICHI |
发明人 |
IZUMIKAWA CHIAKI;TEZUKA KAZUMASA;ITO KAZUTO;ATOBE HITOSHI;KANEKO TORAICHI |
分类号 |
B01D53/68;(IPC1-7):H01K1/56 |
主分类号 |
B01D53/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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