摘要 |
A method of treating a fluorocarbon feedstock includes heating, by means of radio frequency induction, a heating zone to a high temperature, allowing a fluorocarbon feedstock, comprising at least one fluorocarbon compound, to he at up in the heating zone so that the fluorocarbon compound dissociates into at least one fluorocarbon precursor or reactive species, and cooling the fluorocarbon precursor or reactive species, thereby forming, from the fluorocarbon precursor or reactive species, at least one more desired fluorocarbon compound.
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