发明名称 HOT PLATE UNIT
摘要 A hot plate unit (1) capable of being cooled in short time without complicating a structure and increasing a size, comprising a hot plate (3) disposed at an opening part (4) of a casing (2A) and having resistance bodies (10), wherein a space (S1) allowing air to be passed there through is formed of the casing (2A) and the hot plate (3), and an inner bottom plate (41) is provided inside the casing (2A).
申请公布号 WO0159816(A1) 申请公布日期 2001.08.16
申请号 WO2000JP08988 申请日期 2000.12.19
申请人 IBIDEN CO., LTD.;FURUKAWA, MASAKAZU;ITO, YASUTAKA;SAITO, JO 发明人 FURUKAWA, MASAKAZU;ITO, YASUTAKA;SAITO, JO
分类号 H01L21/00;H05B3/14;H05B3/26;H05B3/68;H05B3/74;(IPC1-7):H01L21/027 主分类号 H01L21/00
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