Object positioning method for a lithographic projection apparatus

摘要

A method for placement of a object such as a substrate or a mask on a table, said method including: a first placement step in which the object is placed on a first position on the table; a measuring step in which a displacement between the first position of the object and the required position of the object is determined; a removing step in which the object is released and removed from the table; a moving step in which the object and the table are moved relatively to each other by substantially the said displacement, in a direction substantially parallel to the surface of the table; and a second placement step in which the object is placed at the required position on the table.