发明名称 |
Active anti-vibration apparatus and exposure apparatus |
摘要 |
This invention relates to an active anti-vibration apparatus having an anti-vibration table on which a stage is mounted. This anti-vibration apparatus includes a pneumatic spring actuator for supporting and driving the anti-vibration table, a PI compensator for PI-compensating a target velocity signal determined by a velocity profile concerning the stage and necessary for driving the stage, and a motion mode distributing operation unit for controlling the pneumatic spring actuator in accordance with an output signal from the PI compensator. <IMAGE>
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申请公布号 |
EP1124078(A2) |
申请公布日期 |
2001.08.16 |
申请号 |
EP20010301082 |
申请日期 |
2001.02.07 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
WAKUI, SHINJI;IWAI, ISAO;MAEDA, TAKASHI |
分类号 |
F16F15/02;F16F15/027;G03F7/20;G03F7/22;G05D19/02;H01L21/027;(IPC1-7):F16F15/02 |
主分类号 |
F16F15/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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