Method of manufacturing integrated circuits with intermediate manufacturing quality controlling measurements

摘要

The invention relates to a method of manufacturing integrated circuits, in which a variety of masks is used for manufacturing material layers, among which masks a suitable mask is selected to check the manufacturing quality of the component areas manufactured on the previous layer on the basis of the measurement results. Thus, the value of the component to be manufactured can be tuned to fit into the desired range and the range of the electrical values of the components of integrated circuits can be decreased. The component can be tuned in a variety of ways, e.g. by manufacturing components of different sizes and selecting a suitable component among them (158, 160, 162).