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发明名称
Method of manufacturing semiconductor devices
摘要
申请公布号
EP0720212(B1)
申请公布日期
2001.08.16
申请号
EP19950120252
申请日期
1995.12.21
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
YAHIRO, KAZUYUKI
分类号
C30B25/16;C23C16/40;H01L21/316;H01L21/768;H01L23/522;H01L27/00;(IPC1-7):H01L21/316
主分类号
C30B25/16
代理机构
代理人
主权项
地址
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