DEVICE AND METHOD FOR COUPLING TWO CIRCUIT COMPONENTS WHICH HAVE DIFFERENT IMPEDANCES

摘要

An AC power feed device for conducting electrical power from a source to a load. The feed device has a constant characteristic impedance along its length and an outer periphery that varies in size progressively along its length, or the feed device has an input end connected to the match network and an output end connected to an electrode, and has a characteristic impedance with varies from a value substantially equal to the output impedance of a match network coupled at the input end to a value equal to the impedance of the electrode.