DIAMOND-LIKE CARBON FILM WITH ENHANCED ADHESION

摘要

A method and apparatus (300) for enhancing the adhesion of a diamond-like carbon (DLC) film to a substrate and for producing a strongly adhered DLC film on a substrate (366) on holder (344). The adhesion is enhanced by ion beam pre-processing of the substrate prior to DLC film formation. The apparatus has generating (302) and deposition (304) chambers with vacuum systems (306 A) and (306 B), gas bottle (312) inputs feed gas at tube (314). The ion beam has source (310) and shaping systems (316, 320 - 328). The DLC film vapor source (368) produces vapor (354) via sublimation oven (346). Monitoring is preformed via Faraday cup (342), current monitor (340), and deposition rate sensors (360, 362, 364).