LAMP ANNEAL DEVICE AND SUBSTRATE OF DISPLAY DEVICE
摘要
An improved lamp annealing device is provided for annealing semiconductor formed on a transparent substrate. A lamp annealing device is provided with means for heating semiconductor selectively, and the temperature of the substrate being annealing is controlled. The annealing undergoes feedback control based on the light reflecting from or passing through the annealed semiconductor.
申请公布号
WO0159823(A1)
申请公布日期
2001.08.16
申请号
WO2001JP00806
申请日期
2001.02.05
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;MORITA, YUKIHIRO;NISHITANI, MIKIHIKO;SHIBUYA, MUNEHIRO