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发明名称
Method of forming semiconductor crystal and semiconductor device
摘要
申请公布号
EP0575965(B1)
申请公布日期
2001.08.16
申请号
EP19930109962
申请日期
1993.06.22
申请人
SONY CORPORATION
发明人
SAMESHIMA, TOSHIYUKI;HARA, MASAKI;SANO, NAOKI;PAL, GOSAIN DHARAM;KONO, ATSUSHI;WESTWATER, JONATHAN;USUI, SETSUO
分类号
H01L21/02;H01L21/20;H01L21/268;H01L21/336;H01L21/84;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L21/76
主分类号
H01L21/02
代理机构
代理人
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