| 摘要 |
Tests characterize repeatability of a stage, microscope objective turret, th e mechanical centration of optical paths, and parfocality of optical paths. Th e process includes selecting a lens with first magnification (62), inserting a calibration plate into the optical path (64), locating and centering a fiducial (66) by grossly positioning the stage (70), focus panning (72), determining the location of the center of the fiducial (74), and translating the stage to the center of the fiducial (76). After the fiducial center is recorded (68) the stage is moved in a star-like pattern (78) while imaging t he fiducial (80) to help determine the lateral X and Y position of the center (82) for generating a data array (84) which is used in determining the repeatability of stage movement (88) by determining the maximum and minimum coordinate (86).
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