| 摘要 |
PROBLEM TO BE SOLVED: To provide a nonmagnetic, low vibration, low heating, and low dusting vacuum-corresponding sliding device capable of increasing the speed, acceleration, and service life of a table mechanism disposed in a vacuum chamber, realizing a very high positioning accuracy. SOLUTION: A table 2 is installed on a first guide shaft 3 inserted into a long through-hole 12 formed in a wall opposed to the vacuum chamber 11. A first bearing part 4 is loosely fitted to the first guide shaft 3 projected to the outside of the vacuum chamber 11 to form a hydrostatic fluid bearing and a second guide shaft 6 is loosely fitted to a second bearing part 5 orthogonally connected to the first guide shaft 3 to form a hydrostatic fluid bearing. A third bearing part 8 formed so as to surround the through-hole 12 and having annular suction grooves 24 and 25 in an inner peripheral part of the bearing surface is provided on the outer wall surface of the vacuum chamber 11, and forms the hydrostatic fluid bearing together with a pressure receiving part 9 provided at the end part opposed to the third bearing part 8 of the first bearing part 4 to compose the vacuum-corresponding sliding device. |
