| 摘要 |
A solid target (11) is formed with a cavity (12). The inner wall of the solid target at the cavity is ablated by ablation pulsed laser beams (13). The solid target is left standing until a highly densified portion (15) of a vaporized substance (14) is formed in the space within the cavity (14), and the highly densified portion (15) is then irradiated with heating pulsed laser beams (17), thereby forming high-temperature plasma (18) for generating radiation rays (19). As a result, good-quality radiation rays accompanied by a minimal amount of debris can be generated.
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