发明名称 |
Method for accurate channel-length extraction in MOSFETs |
摘要 |
A method for extracting a channel length between a source and a drain in a substrate of a transistor is disclosed herein. The method includes forward biasing the source with respect to the substrate to inject a charge into the substrate, collecting the charge at the drain, and calculating the channel length from the charge collected at the drain.
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申请公布号 |
US6275972(B1) |
申请公布日期 |
2001.08.14 |
申请号 |
US19990310806 |
申请日期 |
1999.05.12 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
LONG WEI;LIU YOWJUANG W. |
分类号 |
G01R31/26;H01L21/66;(IPC1-7):G06F17/50 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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