| 摘要 |
PROBLEM TO BE SOLVED: To provide a new method for manufacturing a ceramic micro-tube wherein internal stress of membrane is utilized in forming the tube, and a heat treatment process can be omitted. SOLUTION: For a method for manufacture of a ceramic micro-tube a ceramic membrane is prepared on a metal, plastic semiconductor or alkali halide substrate which is easy to be removed by a physical method such as a spattering method, laser abrasion method, vacuum evaporation method, ion plating method or the like and a chemical method of a sol gel method, an MOCVD method or the like. Thereafter, the substrate is removed and the ceramic micro-tube is obtained by forming by internal stress of the membrane without necessitating the heat treatment process.
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