ION-ZIRCONIUM-BORON-SILVER SOFT MAGNETIC MATERIAL AND METHOD FOR DEPOSITION OF THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a soft magnetic material as a magnetic core material combining characteristics of high magnetic permeability, low loss and high saturation magnetization in the MHz region and a method for deposition of a soft magnetic thin film. SOLUTION: An Fe86.7Zr3.3B4Ag6 amorphous thin film, in which Ag is added to an Fe-Zr-B composition constituting a crystal phase, is deposited by the DC magnetron sputtering method using an Fe-Zr-B alloy target and a small piece of Ag. Then vacuum heat treatment is carried out in a uniaxial magnetic field at about 400 deg.C for 1 h, followed by cooking using a fan.