| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm substrate having durability and high displacing properties, having a flexible volume linear to the load, and suitable for a sensor. SOLUTION: This diaphragm substrate is a ceramic consisting essentially of zirconia, and containing at least one stabilizer selected from the group consisting of a rare earth element oxide (Re2O3) and an alkaline earth oxide as a stabilizer, and having a crystal phase consisting essentially of tetragonal and/or cubic, and is characterized by 0.05-0.2 mm thickness, >=10 MPa surface residual stress, >=150 GPa young's modulus, and the displacement magnitude at 0-800 KPa additional pressure, substantially represented by a liner function. |
