发明名称 SHIELD-MOUNTING JIG
摘要 PROBLEM TO BE SOLVED: To provide a jig for mounting a shield, capable of easily and horizontally holding a radiation shield hung down by using the same dimensional length of a wire without changing the length of the wire. SOLUTION: This shield-mounting jig used in a single crystal-pulling up unit and used for mounting the radiation shield 23 at a lifter shaft 21 is characterized by installing a rod 13 toward the lifter shaft 21 as freely attachable and detachable and also in a fixing relationship, and attaching the wire 14 for supporting the radiation shield 23 at the rod 13.
申请公布号 JP2001220290(A) 申请公布日期 2001.08.14
申请号 JP20000031827 申请日期 2000.02.09
申请人 TOSHIBA CERAMICS CO LTD 发明人 KINKON KEIJI;SUZUKI YASUHIRO
分类号 H01L21/208;C30B15/20;C30B29/06;(IPC1-7):C30B29/06 主分类号 H01L21/208
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