| 摘要 |
<p>PROBLEM TO BE SOLVED: To highly precisely align ICs in a tray by using a pair of uniaxial actuators connected to both ends of tray holder fro vibrating and tilting the tray holder. SOLUTION: A tray holder positioning and driving mechanism comprises the tray holder 11 provided on a base 1 via an actuator 30, the tray holder 11 being vibrated by the drive of the actuator 30. The actuator 30 consists of first and second uniaxial actuators 20, 21 provided at both ends of the tray holder 11.</p> |
