AIR FILM-TYPE THIN FILM RESONATOR USING PIERS AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An air film-type thing film resonator using piers and a manufacturing method thereof are provided to enable an etching process to be easily performed, ensure superior characteristic of a resonator, and improve a yield. CONSTITUTION: An air film(30) includes an upper electrode(39), a piezoelectric thin film(36), a lower electrode(34), and a protective film(31). A support(22) supports the air film(30). The air film(30) and the support(22) are formed on an upper surface of the substrate(10). The support(22) is formed on a surface of the substrate(10). A sacrificial layer is formed between the supports(22). The air film(30) is formed on an upper end of the support(22) and the sacrificial layer to be exposed to the air. The sacrificial layer between the supports(22) is removed. A lead line(40) is formed by cutting a reference resonator element. The lead line is soldered on the upper electrode(39) and the lower electrode(34) such that a predetermined power is applied from the outside to vibrate the air film(30).