发明名称 |
Ultraminiature fiber optic pressure transducer and method of fabrication |
摘要 |
A method of batch fabrication of ultraminiature fiber optic pressure transducers including the steps of: providing a first substrate with a first sacrificial layer formed thereover; forming a plurality of light reflective diaphragm structures on the first sacrificial layer; forming a plurality of fiber stopper structures on the light reflective diaphragm structures; forming a plurality of fiber alignment cavity structures on the fiber stopper structures, the light reflective diaphragm structures, fiber stopper structures and fiber alignment cavity structures providing a plurality of fiber alignment assemblies; providing a second substrate with a second sacrificial layer formed thereover; forming a plurality of ferrule structures over the second sacrificial layer; inputting a plurality of fibers into the ferrule structures and sealing each of the ferrule structures to the fiber inserted therein, the ferrule structures and the fibers providing a plurality of fiber-ferrule assemblies; etching the second sacrificial layer releasing the fiber-ferrule assemblies; inputting the fiber-ferrule assemblies into the fiber alignment assemblies and sealing each of the fiber alignment assemblies to the fiber-ferrule assembly inserted therein, the fiber alignment assemblies and the fiber-ferrule assemblies providing a plurality of fiber optic pressure transducers; and etching the first sacrificial layer releasing the fiber optic pressure transducers. |
申请公布号 |
AU3462901(A) |
申请公布日期 |
2001.08.14 |
申请号 |
AU20010034629 |
申请日期 |
2001.01.29 |
申请人 |
PACIFIC WAVE INDUSTRIES, INC. |
发明人 |
HAROLD R. FETTERMAN;LEONID BUKSHPUN;JOSEPH MICHAEL |
分类号 |
A61B5/00;A61B5/0215;A61B5/03;G01L9/00 |
主分类号 |
A61B5/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|