,申请号JP19930111055-传众专利搜索

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发明名称
摘要
申请公布号	JP3198718(B2)	申请公布日期	2001.08.13
申请号	JP19930111055	申请日期	1993.04.14
申请人		发明人
分类号	G03F7/20;G03B27/32;G03F9/00;H01L21/027;H01L21/30;(IPC1-7):H01L21/027	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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