,申请号JP19930097065-传众专利搜索

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发明名称
摘要
申请公布号	JP3198713(B2)	申请公布日期	2001.08.13
申请号	JP19930097065	申请日期	1993.03.31
申请人		发明人
分类号	G01N13/00;H01L21/66;(IPC1-7):G01N13/00	主分类号	G01N13/00
代理机构		代理人
主权项
地址

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