WAFER HOLDER FOR SEMICONDUCTOR MANUFACTURING APPARATUS

摘要

PURPOSE: A wafer holder for a semiconductor manufacturing apparatus is provided to include a conductive layer and a pair of ceramic base members sandwiching the conductive layer therebetween, wherein the conductive layer has a body facing a wafer holding surface of the member of ceramic and an extraction extracted from the body for external connection and the body and the extraction are arranged substantially in a single plane. CONSTITUTION: The semiconductor manufacturing apparatus includes a vacuum chamber(50) having provided therein a wafer holder(10), a top electrode(30) for generating a plasma, and a gas shower unit(40). Wafer holder(10) is used to hold a wafer(20) and mainly has a heater(1) for heating wafer(20), a bottom electrode(2) for generating a plasma, and an electrode(3) for an electrostatic chuck for holding wafer(20).