| 摘要 |
PURPOSE: To provide an oxygen and high purity air supply system using compressed air for feeding oxygen with high purity air by means of an oxygen concentrating system without any quality fluctuation of oxygen. CONSTITUTION: This oxygen and high purity air supplying system comprises a compressor, the oxygen concentrating system constructed of a plurality of zeolite filling tank inlet two-way selector valves connected to the compressor, a plurality of zeolite filling tanks connected to the zeolite tank inlet two-way selector valves respectively, and a plurality of zeolite filling tanks tank outlet check valves connected to the zeolite filling individually, and a high purity air system constructed of an air filter connected to the compressor and a plurality of high purity air valves connected to the air filter.
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