| 摘要 |
PURPOSE: To prevent deterioration of the planarity of a substrate and the soiling of a substrate-placing surface by a resist sneaked into the back side of the substrate. CONSTITUTION: A pair of first groove parts 31 and 32 extended from one end to the other end along a scanning direction and a pair of second groove parts 33 and 34 extended from one end to the other end along a direction nearly orthogonal, with the scanning direction formed on the placing surface of a substrate holder. The positions of the first groove part and the second groove part correspond to a position with which a substrate peripheral part comes into contact, when the substrate is placed vertically or laterally. Even if the sneak path of the resist exists at the peripheral part of the substrate, it will enter the groove part, so that the deterioration of the planarity of the substrate and the contamination of the substrate placing surface of the substrate holder are prevented.
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