ELECTROSTATIC CAPACITY DETECTION TYPE SENSOR, GYROSCOPE, AND INPUT DEVICE

摘要

PURPOSE: To provide an electrostatic capacity detection type sensor capable of suppressing the electric noise occurring around electrodes and improving detection sensitivity through the improvement of the S-N ratio. CONSTITUTION: This gyroscope 1 is provided with a tuning fork 6 having three legs 9, driving electrodes 4 and detecting electrodes 5 provided on both glass substrates 2, 3, driving feedthroughs 7 feeding drive signals to the driving electrodes 4, and detecting feedthroughs 8 extracting detection signals from the detecting electrodes 5. Detection-drive shield sections 19, detection-detection shield sections 20, and drive-drive shield sections 21 electrostatically shielding between the feedthroughs are provided respectively between the adjacent feedthroughs arranged as the driving feedthroughs 7 and the detecting feedthroughs 8.