TUNGSTEN CARBIDE/TITANIUM ALUMINUM NITRIDE SUPERLATTICE COATING FILM AND MANUFACTURING APPARATUS AND METHOD THEREOF

摘要

PURPOSE: A nitride/carbide-based super lattice coating film is provided to ensure adaptability in the industrial machinery by having high hardness and high degree of close contact while enabling precision control of thickness. CONSTITUTION: A superlattice coating film(100) is formed on a base metal(10) of a high speed tool steel or a hard metal, and is structured to have superlattice abrasion resistant layers(11) with super high hardness. A stress attenuating layer(12) is placed between the superlattice abrasion resistant layers(11) to reduce the stress and enhance the cohesive force therebetween. The superlattice abrasion resistant layers(11) include a TiN layer(110a) and a WC layer(110b) layered at least once. Each of the TiN layer(110a) and the WC layer(110b) has a thickness of several millimeters. The stress attenuating layer(12) is formed of a mixture of Ti and WC. The total thickness of the superlattice coating film(100) is 3 to 5 microns.