LINEAR MOTOR, FLUID CIRCULATION SYSTEM FOR THE SAME AND EXPOSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a fluid circulation system for minimizing influence of heat from a coil of linear motor to be used for a stage apparatus. SOLUTION: A circulation system (10) for cooling a linear shaft motor (12) is provided with a magnet array (22) and a linear motor (12) having a coil assembly (16). The circulation system (10) is also provided with a coil housing (36) for surrounding the coil assembly (16) to define a fluid route (46) between the coil housing (36) and the coil assembly (16). The fluid (44) from a fluid source (42) is sent to the fluid route (46) via an inlet port (36). The flow rate of the fluid (44) is controlled to keep the external surface (111) of the coil housing (36) to a certain temperature in order to control the influence (12) of the motor for the environment and structural element of the peripheral area.